The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 18, 2021

Filed:

Mar. 19, 2018
Applicant:

Toyota Jidosha Kabushiki Kaisha, Toyota, JP;

Inventors:

Masanori Miura, Toyota, JP;

Jun Takayanagi, Nagoya, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 11/06 (2006.01); G01N 21/3586 (2014.01); G01B 15/02 (2006.01); G01N 21/84 (2006.01);
U.S. Cl.
CPC ...
G01B 11/0633 (2013.01); G01B 11/0625 (2013.01); G01B 11/0691 (2013.01); G01B 15/02 (2013.01); G01N 21/3586 (2013.01); G01N 21/8422 (2013.01);
Abstract

A film thickness measuring apparatus includes a displacement sensor, and a film thickness calculator that includes a first processor, a second processor, and a third processor. The displacement sensor detects displacement of a sheet in its thickness direction at a location opposite to a portion of a terahertz scanner from which a terahertz wave is applied to a conveyance path. In accordance with a detection signal provided by the displacement sensor, the first processor determines the speed of displacement of the sheet in its thickness direction while the sheet is conveyed along the conveyance path. In accordance with the speed of displacement, the second processor corrects a scan waveform acquired by the terahertz scanner. In accordance with the peaks of the intensity of the terahertz wave that appear in the scan waveform corrected by the second processor, the third processor calculates the thickness of a film formed on the sheet.


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