The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 18, 2021
Filed:
Dec. 15, 2017
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
David Fenwick, Los Altos Hills, CA (US);
Xiaowei Wu, San Jose, CA (US);
Jennifer Y. Sun, Mountain View, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 18/00 (2006.01); C23C 16/455 (2006.01); C23C 16/40 (2006.01); C23C 14/06 (2006.01); C23C 14/08 (2006.01); C23C 16/34 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45525 (2013.01); C23C 14/0641 (2013.01); C23C 14/08 (2013.01); C23C 16/34 (2013.01); C23C 16/40 (2013.01); C23C 16/405 (2013.01);
Abstract
A multi-layer coating for a surface of an article comprises a diffusion barrier layer and an erosion resistant layer. The diffusion barrier layer may be a nitride film including but not limited to TiN, TaN, ZrN, and TiZrN. The erosion resistant layer may be a rare oxide film comprising YZrO. The diffusion barrier layer and the erosion resistant layer may be deposited on the article's surface using a thin film deposition technique including but not limited to, ALD, PVD, and CVD.