Laser device and extreme ultraviolet light generation device using delay determination at a shutter

Abstract

A laser device includes: a master oscillator () configured to output a pulse laser beam (L) based on a light emission trigger signal (S); a delay circuit () configured to generate a switching signal (S) after a predetermined delay time has elapsed since reception of the light emission trigger signal (S); a high voltage switch () configured to generate a high voltage pulse based on the switching signal (S); an optical shutter () positioned on the optical path of the pulse laser beam (L) and driven based on the high voltage pulse; and a high voltage monitor () configured to detect the high voltage pulse and transmit a high voltage pulse sensing signal (S) to the delay circuit (). The delay circuit () determines the delay time based on the light emission trigger signal (S) and the high voltage pulse sensing signal (S).