The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 2021
Filed:
Sep. 14, 2018
Applicant:
Ebara Corporation, Tokyo, JP;
Inventor:
Shuichi Suemasa, Tokyo, JP;
Assignee:
EBARA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
A46B 13/02 (2006.01); B08B 1/04 (2006.01); H01L 21/02 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67046 (2013.01); A46B 13/02 (2013.01); B08B 1/04 (2013.01); H01L 21/02052 (2013.01); H01L 21/67017 (2013.01); H01L 21/6719 (2013.01); H01L 21/67034 (2013.01); H01L 21/67253 (2013.01); H01L 21/67276 (2013.01); H01L 21/68728 (2013.01); H01L 21/68785 (2013.01);
Abstract
A break-in apparatushas a supply unitfor supplying a cleaning liquid, a substrate support unitfor holding a dummy substrate Wand a cleaning member holding unitfor performing a break-in processing on the cleaning memberby rotating the cleaning memberand bringing the cleaning memberinto contact with the dummy substrate W