The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 2021
Filed:
Aug. 28, 2017
Hitachi High-tech Corporation, Tokyo, JP;
Tomonori Nakano, Tokyo, JP;
HITACHI HIGH-TECH CORPORATION, Tokyo, JP;
Abstract
Stability of a power source required to operate an aberration corrector is lowered in a wire aberration corrector. Accordingly, a power source that is more inexpensive than a power source in the related art may be used and apparatus cost may be reduced. A multipole lens that is provided in an aberration corrector includes a plurality of pairs of current linestothat are each provided on the same plane in an axisymmetric manner around an optical-axis. The current lines each include a main line sectionthat is parallel to the optical-axis and a return line sectionthat faces the main line section. A current in the return line section flows in a direction opposite to a current in the main line section in components parallel to the optical-axis. A distance Rbetween the optical-axis and the return line section is larger than a distance Rbetween the optical-axis and the main line section. Noise caused by stability of a power source that supplies a current to the current lines in an excited multipole field is equal to or less than a predetermined level.