The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 2021
Filed:
Nov. 12, 2019
C. Uyemura & Co., Ltd., Osaka, JP;
Masayuki Utsumi, Osaka, JP;
Nobuhiko Naka, Osaka, JP;
C. Uyemura & Co., Ltd., Osaka, JP;
Abstract
To provide surface treatment that can reduce occurrence of defects caused by incorporation of dust. Rollersare rotatably fixed to rotating shaftsprovided to protrude from lateral protective walls. The lateral protective wallsare fixed perpendicularly to lower protective wallsfixed to outer walls. Hanging platesof a hangerextend through a spacebetween both lower protective wallsand support clips. A liquid, such as water, is filled in spaces defined by the lateral protective walls, the lower protective walls, and the outer walls. The liquidis filled to cover about half of each rotating shaft. Thus, fine dust generated by a transferring mechanism is captured by the liquidand prevented from drifting from the spacetoward the substrate