The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 04, 2021
Filed:
Jul. 31, 2018
Tokyo Electron Limited, Tokyo, JP;
Seiji Yokoyama, Miyagi, JP;
Yasutaka Hama, Miyagi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
In a method for processing a target object, the target object includes a wiring layer having a wiring, a diffusion barrier film provided on the wiring layer, an insulating film provided on the diffusion barrier film, and a metal mask provided on the insulating film and having an opening, and the insulating film has a trench formed at a part of a portion exposed through the opening and a first via hole provided at a part of the trench. The method includes: a first step of forming a sacrificial film on the trench and a side surface of the first via hole of the target object; and a second step of forming a second via hole at a deeper portion than a bottom surface of the first via hole by etching the sacrificial film and the insulating film and removing the sacrificial film from the trench and the first via hole.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile