The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 04, 2021
Filed:
Dec. 16, 2019
Applicant:
Disco Corporation, Tokyo, JP;
Inventors:
Suzu Hoshino, Tokyo, JP;
Hayate Hoshino, Tokyo, JP;
Assignee:
DISCO CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 3/041 (2006.01); H01L 21/67 (2006.01); G06F 3/0488 (2013.01); G06F 3/0484 (2013.01); H01L 21/304 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
G06F 3/04886 (2013.01); G06F 3/04847 (2013.01); H01L 21/304 (2013.01); H01L 21/67715 (2013.01);
Abstract
With a touch panel, an operator sets a moving direction of a moving mechanism by using an arrow key. The set moving direction is displayed in a display portion on the touch panel as an arrow. This enables the operator to set the moving direction in association with a correction while visually recognizing the contents of the setting, so that the operator can set the moving direction with less hesitation. Therefore, it is possible to suppress erroneous setting of the moving direction and to shorten the time required for the setting of the correction.