The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 04, 2021
Filed:
May. 10, 2018
Applicant:
Infineon Technologies Ag, Neubiberg, DE;
Inventors:
Markus Eckinger, Regenstauf, DE;
Dirk Hammerschmidt, Finkenstein, AT;
Florian Brandl, Wolnzach, DE;
Bernhard Winkler, Regensburg, DE;
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L 9/00 (2006.01); B81B 3/00 (2006.01); B81C 3/00 (2006.01);
U.S. Cl.
CPC ...
G01L 9/0072 (2013.01); B81B 3/0021 (2013.01); B81C 3/001 (2013.01); B81B 2201/0264 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/04 (2013.01); B81B 2207/012 (2013.01); B81C 2203/032 (2013.01);
Abstract
A pressure sensor is provided. The pressure sensor includes at least two electrodes and an integrated circuit configured to sense a capacitance between the at least two electrodes. Further, the pressure sensor includes a Microelectromechanical System (MEMS) structure including a conductive or dielectric membrane configured to move, depending on the pressure, relative to the at least two electrodes.