The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 04, 2021
Filed:
May. 31, 2019
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Brian H. Burrows, San Jose, CA (US);
Ala Moradian, Sunnyvale, CA (US);
Kartik Shah, Saratoga, CA (US);
Shu-Kwan Lau, Sunnyvale, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 25/02 (2006.01); C30B 25/14 (2006.01); H01L 21/02 (2006.01); C23C 16/455 (2006.01); C23C 16/30 (2006.01); C30B 29/40 (2006.01);
U.S. Cl.
CPC ...
C30B 25/14 (2013.01); C23C 16/303 (2013.01); C23C 16/455 (2013.01); C30B 29/406 (2013.01); H01L 21/0254 (2013.01); H01L 21/0262 (2013.01); H01L 21/02381 (2013.01);
Abstract
Embodiment disclosed herein include a liner assembly, comprising an injector plate liner, a gas injector liner coupled to the injector plate liner, an upper process gas liner coupled to the gas injector liner, a lower process gas liner coupled to the upper process gas liner, and an injector plate positioned between the injector plate liner and the upper process gas liner, wherein a cooling fluid channel is formed in the injector plate adjacent to the gas injector liner.