Surface treating apparatus and surface treatment method

Abstract

In a flow down type surface treating apparatus, a scattering amount of a processing solution Q is reduced. A honeycomb memberis provided vertically below a transport hanger. The honeycomb memberconsists of a plurality of tubular members with hexagonal holes connected together. When the processing solution Q falls in a vertical direction (in the direction of an arrow α), the processing solution Q passes through through-holes of the honeycomb member. When the processing solution Q hits liquid level H, a part of it is reflected. Since a part of the reflected processing solution Q is reflected obliquely, it collides with an inner wall of the through-hole of the honeycomb member. As a result, the amount of the treatment liquid Q that emerges again on an upper surface of the through-holes is reduced. Thereby, the honeycomb memberexhibits a scattering prevention function.