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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10991608 B1

PDFFull Text
Date of Patent:
Apr. 27, 2021

Filed:

Feb. 06, 2018

Substrate coating apparatus for floating substrate and method

Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventors:

Yousuke Mine, Kumamoto, JP;

Kazuhito Miyazaki, Kumamoto, JP;

Assignee:

TOKYO ELECTRON LIMITED, Tokyo, JP;

Attorney:

Abelman, Frayne & Schwab

Primary Examiner:

Karl Kurple

Int. Cl.
CPC ...
H01L 21/677 (2006.01); B05C 13/02 (2006.01); B65G 47/24 (2006.01); F16C 29/00 (2006.01); H01L 21/67 (2006.01); B25B 11/00 (2006.01); G03F 7/20 (2006.01); H01L 51/56 (2006.01); B05C 5/02 (2006.01); H01L 51/00 (2006.01); B41J 2/01 (2006.01); H01L 27/32 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67787 (2013.01); B05C 13/02 (2013.01); F16C 29/008 (2013.01); H01L 21/67173 (2013.01); H01L 21/67784 (2013.01); B05C 5/0291 (2013.01); B25B 11/00 (2013.01); B41J 2/01 (2013.01); B65G 47/24 (2013.01); G03F 7/70816 (2013.01); H01L 27/3244 (2013.01); H01L 51/0005 (2013.01); H01L 51/0029 (2013.01); H01L 51/56 (2013.01);
Abstract

Provided is a coating apparatus including: a stage unit which floats the substrate to a predetermined height by using wind pressure of gas; a droplet discharge unit which drops the droplet of the functional liquid on the substrate floated to the predetermined height from the stage unit; a main scanning direction moving unit which moves the substrate, which is floated to the predetermined height from the stage unit, in the main scanning direction while holding the substrate; and a sub-scanning direction moving unit which moves the droplet discharge unit in the sub-scanning direction with respect to the substrate floated to the predetermined height from the stage unit. The sub-scanning direction moving unit moves the droplet discharge unit in the sub-scanning direction while the main scanning direction moving unit repeatedly moves the substrate in the main scanning direction and the droplet discharge unit repeatedly drops the droplet.

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