Semiconductor structure and method for forming same

Abstract

A semiconductor structure and a method for forming the same are provided. The forming method may include: providing a base; forming, on the base, a to-be-etched material layer, a core material layer located on the to-be-etched material layer, and an HM material layer located on the core material layer; patterning the HM material layer to form HM layers; etching the core material layer between adjacent HM layers, forming a plurality of first grooves exposed from the to-be-etched material layer, and using the remaining core material layer as a core layer; and forming a side wall layer on side walls of the first groove and the HM layer; after the side wall layer is formed, removing the HM layer and the core layer at the bottom of the HM layer, and forming a plurality of second grooves exposed from the to-be-etched material layer; and removing the to-be-etched material layer at the bottom of the first groove and the second groove by using the side wall layer and the remaining core layer as masks, to form a target pattern. In embodiments and implementations of the present disclosure, the pattern precision of the first groove and the second groove is improved. After the target pattern is formed, the pattern precision of the target pattern is correspondingly improved.