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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10991589 B1

PDFFull Text
Date of Patent:
Apr. 27, 2021

Filed:

Dec. 31, 2018

Correlation between conductivity and ph measurements for koh texturing solutions and additives

Applicant:

Naura Akrion, Inc., Allentown, PA (US);

Inventors:

Ismail Kashkoush, Orefield, PA (US);

Jennifer Rieker, Whitehall, PA (US);

Gim-Syang Chen, Allentown, PA (US);

Dennis Nemeth, Nazareth, PA (US);

Assignee:

NAURA Akrion, Inc.;

Attorney:

The Belles Group, P.C.

Primary Examiner:

Duy Vu N Deo

Int. Cl.
CPC ...
H01L 21/306 (2006.01); H01L 21/66 (2006.01); H01L 21/67 (2006.01); H01L 31/0236 (2006.01);
U.S. Cl.
CPC ...
H01L 21/30604 (2013.01); H01L 21/67075 (2013.01); H01L 21/67086 (2013.01); H01L 21/67253 (2013.01); H01L 22/10 (2013.01); H01L 22/26 (2013.01); H01L 31/02363 (2013.01); Y02E 10/50 (2013.01);
Abstract

The variability of an etchant concentration in an immersion processes for treatment of semiconductor devices can be significantly lowered by continuously measuring the conductivity of an etchant solution and comparing against predetermined thresholds. The etchant concentration can be maintained by a feed and bleed process based on conductivity measurements of the etchant solution and the conductivity measurements being correlated with premeasured pH values of an etchant solution.

Find Patent Forward Citations

Kashkoush, Ismail. (2021). Correlation between conductivity and ph measurements for koh texturing solutions and additives (U.S. Patent No. 10991589). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10991589

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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