The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 2021
Filed:
Jul. 07, 2020
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Stefan Hembacher, Bobingen, DE;
Marwene Nefzi, Ulm, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G02B 7/182 (2021.01); G02B 5/08 (2006.01); G02B 26/08 (2006.01);
U.S. Cl.
CPC ...
G02B 7/182 (2013.01); G02B 5/0891 (2013.01); G02B 26/0825 (2013.01); G03F 7/702 (2013.01); G03F 7/7015 (2013.01); G03F 7/70033 (2013.01); G03F 7/70258 (2013.01); G03F 7/70316 (2013.01);
Abstract
An optical element serves for the beam guidance of imaging light in projection lithography. The optical element has a main body and at least one optical surface carried by the main body. At least one coupling unit is arranged on the main body. The coupling unit serves to attach a compensation weight element for compensating a figure deformation of the optical surface. The result is an optical element which can be provided at the use location with a relatively small figure deformation.