The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 2021
Filed:
Jun. 02, 2015
Applicant:
Nikon Metrology NV, Leuven, BE;
Inventors:
Anthony R. Slotwinski, Reston, VA (US);
Mina A. Rezk, Bristow, VA (US);
Pavel Slyusarev, Rockville, MD (US);
Assignee:
Nikon Metrology NV, Leuven, BE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 6/293 (2006.01); G02B 6/02 (2006.01); G01S 7/484 (2006.01); G01S 7/486 (2020.01);
U.S. Cl.
CPC ...
G02B 6/29398 (2013.01); G01S 7/484 (2013.01); G01S 7/486 (2013.01); G02B 6/02395 (2013.01); G02B 6/29346 (2013.01);
Abstract
An optical delay between a first fiber and a second fiber is temperature compensated by combining fibers with different thermal path length changes. In some examples, fibers with different buffer coatings exhibit different path length changes per unit length and temperature. Combining such fibers in a fiber array provides a path length difference that is substantially independent of temperature.