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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10988649 B1

PDFFull Text
Date of Patent:
Apr. 27, 2021

Filed:

Dec. 21, 2018

Method for imparting water repellency to substrate, surface treatment agent, and method for suppressing collapse of organic pattern or inorganic pattern in cleaning substrate surface with cleaning liquid

Applicant:

Tokyo Ohka Kogyo Co., Ltd., Kawasaki, JP;

Inventors:

Kenji Seki, Kawasaki, JP;

Takumi Namiki, Kawasaki, JP;

Assignee:

Tokyo Ohka Kogyo Co., Ltd., Kawasaki, JP;

Attorney:

Knobbe Martens Olson & Bear LLP

Primary Examiner:

Joseph D Anthony

Int. Cl.
CPC ...
C09K 3/18 (2006.01); G03F 7/075 (2006.01); H01L 21/02 (2006.01); G03F 7/20 (2006.01); C09D 7/63 (2018.01); G03F 7/40 (2006.01); G03F 7/16 (2006.01); C09D 5/00 (2006.01); C08K 5/3472 (2006.01); C08K 5/3445 (2006.01); C08K 5/5419 (2006.01);
U.S. Cl.
CPC ...
C09K 3/18 (2013.01); C09D 5/00 (2013.01); C09D 7/63 (2018.01); G03F 7/075 (2013.01); G03F 7/165 (2013.01); G03F 7/2041 (2013.01); G03F 7/40 (2013.01); H01L 21/02057 (2013.01); C08K 5/3445 (2013.01); C08K 5/3472 (2013.01); C08K 5/5419 (2013.01);
Abstract

A method for imparting water repellency to a substrate; a surface treatment agent used in the method; and a method for suppressing collapse of an organic or inorganic pattern in cleaning the substrate surface with a cleaning liquid. The method includes exposing a surface of a substrate to a surface treatment agent, the surface treatment agent including a water-repelling agent and a nitrogen-containing heterocyclic compound, the water-repelling agent including an alkoxymonosilane compound having a hydrophobic group bonded to a silicon atom. A surface treatment agent including a water-repelling agent and a nitrogen-containing heterocyclic compound, the water-repelling agent (A) including an alkoxymonosilane compound having a hydrophobic group bonded to a silicon atom.

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