The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 2021
Filed:
Apr. 28, 2017
Applicant:
Entegris, Inc., Billerica, MA (US);
Inventors:
Tom Leblanc, Mendon, MA (US);
Joe Wildgoose, North Smithfield, RI (US);
Marc Venet, Natick, MA (US);
Evan Warniers, Acton, MA (US);
John Gaudreau, Chepachet, RI (US);
Assignee:
ENTEGRIS, INC., Billerica, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 46/00 (2006.01); B01D 46/52 (2006.01); B01D 27/06 (2006.01); B01D 46/10 (2006.01); B01D 27/08 (2006.01);
U.S. Cl.
CPC ...
B01D 27/06 (2013.01); B01D 27/08 (2013.01); B01D 46/0005 (2013.01); B01D 46/0026 (2013.01); B01D 46/0036 (2013.01); B01D 46/10 (2013.01); B01D 46/521 (2013.01); B01D 2265/04 (2013.01); B01D 2279/51 (2013.01);
Abstract
Filters for semiconductor tool and clean room applications to control airborne molecular contamination. The filter cartridge system includes a filter cartridge having a non-woven fiber and at least one adsorbent. In some embodiments, the filter cartridge is constructed of substantially combustible materials to support its end of service destruction.