The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 20, 2021
Filed:
May. 10, 2019
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventor:
Koji Kagawa, Koshi, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/308 (2006.01); H01L 21/687 (2006.01); H01L 21/033 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/3086 (2013.01); H01L 21/0332 (2013.01); H01L 21/0337 (2013.01); H01L 21/3081 (2013.01); H01L 21/67069 (2013.01); H01L 21/68714 (2013.01);
Abstract
There is provided a method of processing a substrate, the method including: a production process of producing B(OH) or BOby bringing an oxidizing agent into contact with a boron-based film in a substrate in which the boron-based film is formed on a film including a silicon-based film; and a removal process of removing the boron-based film from the substrate by dissolving the B(OH) or BOproduced in the production process in water.