The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 20, 2021
Filed:
Jul. 14, 2017
Rigaku Corporation, Tokyo, JP;
RIGAKU CORPORATION, Tokyo, JP;
Abstract
A hybrid inspection system of the present invention is an inspection system including a first inspection device () for inspecting a sample () based on X-ray measurement data obtained by irradiating the sample () with X-rays, and a second inspection device () for inspecting the sample () by a measuring method using no X-rays. The X-ray measurement data obtained by the first inspection device or an analysis result of the X-ray measurement data is output to the second inspection device (). In the second inspection device (), the structure of the sample () is analyzed by using the X-ray measurement data input from the first inspection device () or the analysis result of the X-ray measurement data.