The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 20, 2021

Filed:

Mar. 14, 2018
Applicant:

Ulvac, Inc., Chigasaki, JP;

Inventors:

Toshio Suzuki, Chigasaki, JP;

Tomonari Tanaka, Chigasaki, JP;

Kenji Hashimoto, Chigasaki, JP;

Assignee:

ULVAC, INC., Chigasaki, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F04B 39/00 (2006.01); F04B 37/14 (2006.01); F04C 29/06 (2006.01);
U.S. Cl.
CPC ...
F04B 39/0027 (2013.01); F04B 37/14 (2013.01); F04B 39/0061 (2013.01); F04C 29/06 (2013.01);
Abstract

A vacuum pump includes a pump main body and a sound muffling device. The pump main body includes a housing including an intake port and an exhaust port, and a rotor that is rotatably arranged inside the housing and transports gas from the intake port to the exhaust port. The sound muffling device includes a casing, a first passage portion, and a second passage portion. The casing includes an opening end portion that is airtightly connected to an outer wall surface of the housing, a bottom wall portion that faces the opening end portion, and a peripheral wall portion, the casing defining an expansion chamber by the outer wall surface of the housing and respective inner wall surfaces of the bottom wall portion and the peripheral wall portion.


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