The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 13, 2021

Filed:

Oct. 18, 2018
Applicant:

Disco Corporation, Tokyo, JP;

Inventors:

Yuji Hadano, Tokyo, JP;

Masatoshi Nayuki, Tokyo, JP;

Keiji Nomaru, Tokyo, JP;

Assignee:

DISCO CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); B23K 26/082 (2014.01); B23K 26/08 (2014.01); B23K 26/06 (2014.01); B23K 26/14 (2014.01); B23K 26/70 (2014.01); B23K 26/146 (2014.01); B23K 26/04 (2014.01); B23K 26/12 (2014.01); B23K 26/0622 (2014.01); B23K 26/03 (2006.01); B23K 26/38 (2014.01); B23K 26/364 (2014.01); B23K 26/60 (2014.01); B23K 26/402 (2014.01); B23K 103/00 (2006.01); B23K 101/40 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67092 (2013.01); B23K 26/032 (2013.01); B23K 26/04 (2013.01); B23K 26/0622 (2015.10); B23K 26/0665 (2013.01); B23K 26/0821 (2015.10); B23K 26/0823 (2013.01); B23K 26/0853 (2013.01); B23K 26/1224 (2015.10); B23K 26/146 (2015.10); B23K 26/147 (2013.01); B23K 26/364 (2015.10); B23K 26/38 (2013.01); B23K 26/402 (2013.01); B23K 26/60 (2015.10); B23K 26/702 (2015.10); B23K 2101/40 (2018.08); B23K 2103/56 (2018.08);
Abstract

A laser beam applying unit of a laser processing apparatus includes a laser oscillator adapted to emit a laser beam, a condenser adapted to focus the laser beam emitted from the laser oscillator and to thereby apply the laser beam to the workpiece held by a holding unit, and a liquid layer former disposed at a lower end portion of the condenser and adapted to form a layer of a liquid on an upper surface of the workpiece. The liquid layer former includes a casing having a bottom wall that forms a gap between itself and the upper surface of the workpiece, a liquid supply section adapted to supply the liquid to the casing, and a transparent section that is formed at the bottom wall adjacently to the jet port and that permits transmission of the laser beam therethrough.


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