The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 13, 2021

Filed:

Jun. 29, 2018
Applicant:

Tokyo Ohka Kogyo Co., Ltd., Kawasaki, JP;

Inventors:

Hiroto Yamazaki, Kawasaki, JP;

Masahito Yahagi, Kawasaki, JP;

Kenta Suzuki, Kawasaki, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/038 (2006.01); G03F 7/039 (2006.01); G03F 7/16 (2006.01); G03F 7/38 (2006.01); G03F 7/32 (2006.01); G03F 7/20 (2006.01); C09D 125/18 (2006.01); C08F 212/14 (2006.01); C08F 212/32 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0382 (2013.01); C09D 125/18 (2013.01); G03F 7/0392 (2013.01); G03F 7/162 (2013.01); G03F 7/168 (2013.01); G03F 7/2006 (2013.01); G03F 7/2037 (2013.01); G03F 7/322 (2013.01); G03F 7/38 (2013.01); C08F 212/14 (2013.01); C08F 212/32 (2013.01); C08F 2800/10 (2013.01);
Abstract

A resist composition which generates an acid when exposed and whose solubility in a developer is changed by an action of an acid, the resist composition including a polymer compound (A1) which has a constitutional unit (a0) derived from a compound represented by Formula (a0-1) and a constitutional unit (a10) derived from a compound represented by Formula (a10-1) and does not have a constitutional unit represented by Formula (1). In the formulas, Raand Rarepresent a polymerizable group-containing group; Waand Warepresent an (n+1)-valent or (n+1)-valent aromatic hydrocarbon group; nand nrepresent an integer of 1 to 3; and Zrepresents Fe, Co, Ni, Cr, or Ru.


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