The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 13, 2021
Filed:
Aug. 31, 2018
Toshiba Memory Corporation, Tokyo, JP;
Ryoji Yoshikawa, Kanagawa, JP;
TOSHIBA MEMORY CORPORATION, Tokyo, JP;
Abstract
A defect inspection device includes an image sensor configured to obtain an image of a target region of an object and divide the image of the target region into an array of pixels, and a processor. The processor is configured to receive a signal indicating a value of a property of the divided image, select a first pixel in the divided image, determine the value of the property of the first pixel, determine a reference pixel value for the first pixel, compare the reference pixel value to the value of the first pixel to obtain a difference value, and set a threshold difference at which a defect is assessed to be present, based at least in part on the value of the property of second pixels in the divided image adjacent to the first pixel.