The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 13, 2021
Filed:
Feb. 13, 2018
Kla-tencor Corporation, Milpitas, CA (US);
Ilya Bezel, Mountain View, CA (US);
Anatoly Shchemelinin, Bozeman, MT (US);
Eugene Shifrin, Sunnyvale, CA (US);
Matthew Panzer, San Jose, CA (US);
Matthew Derstine, Los Gatos, CA (US);
Jincheng Wang, San Jose, CA (US);
Anant Chimmalgi, San Jose, CA (US);
Rajeev Patil, Fremont, CA (US);
Rudolf Brunner, Mountain View, CA (US);
KLA Corporation, Milpitas, CA (US);
Abstract
A plasma cell for use in a laser-sustained plasma light source includes a plasma bulb configured to contain a gas suitable for generating a plasma. The plasma bulb is transparent to light from a pump laser, wherein the plasma bulb is transparent to at least a portion of a collectable spectral region of illumination emitted by the plasma. The plasma bulb of the plasma cell is configured to filter short wavelength radiation, such as VUV radiation, emitted by the plasma sustained within the bulb in order to keep the short wavelength radiation from impinging on the interior surface of the bulb.