The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 13, 2021
Filed:
May. 24, 2018
Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;
Chun-Hsi Huang, Hsinchu, TW;
Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;
Abstract
The present disclosure describes a chemical mechanical planarization system that includes a pad on a rotating platen, a wafer carrier configured to hold the wafer surface against the pad and apply pressure to the wafer, a slurry dispenser configured to dispense slurry on the pad, and a conditioning wheel configured to condition the pad. The conditioning wheel further includes a base and one or more flexible structures attached to the base with each flexible structure having an elastic body configured to exert a downforce on a feature of the pad, where the downforce is proportional to the height of the feature.