The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 06, 2021

Filed:

Nov. 20, 2017
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Hariklia Deligianni, Alpine, NJ (US);

William J. Gallagher, Ardsley, NY (US);

Andrew J. Kellock, Suunyvale, CA (US);

Eugene J. O'Sullivan, Nyack, NY (US);

Lubomyr T. Romankiw, Briancliff Manor, NY (US);

Naigang Wang, Ossining, NY (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 18/16 (2006.01); C23C 18/18 (2006.01); C23C 18/50 (2006.01); H01L 49/02 (2006.01); H01L 21/288 (2006.01); H01F 5/00 (2006.01); H01F 27/00 (2006.01); H01F 41/04 (2006.01); H01L 23/522 (2006.01); H01F 41/26 (2006.01); H01F 1/04 (2006.01); H01F 27/24 (2006.01); H01F 27/28 (2006.01);
U.S. Cl.
CPC ...
H01L 28/10 (2013.01); C23C 18/16 (2013.01); C23C 18/168 (2013.01); C23C 18/1673 (2013.01); C23C 18/1694 (2013.01); C23C 18/1696 (2013.01); C23C 18/1831 (2013.01); C23C 18/50 (2013.01); H01F 1/04 (2013.01); H01F 5/00 (2013.01); H01F 27/00 (2013.01); H01F 27/24 (2013.01); H01F 27/28 (2013.01); H01F 41/046 (2013.01); H01F 41/26 (2013.01); H01L 21/288 (2013.01); H01L 21/2885 (2013.01); H01L 23/5227 (2013.01); C23C 18/1605 (2013.01); C23C 18/165 (2013.01); C23C 18/1651 (2013.01);
Abstract

An on-chip magnetic structure includes a magnetic material comprising cobalt in a range from about 80 to about 90 atomic % (at. %) based on the total number of atoms of the magnetic material, tungsten in a range from about 4 to about 9 at. % based on the total number of atoms of the magnetic material, phosphorous in a range from about 7 to about 15 at. % based on the total number of atoms of the magnetic material, and palladium substantially dispersed throughout the magnetic material.


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