The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2021
Filed:
Jun. 23, 2016
Hitachi High-technologies Corporation, Tokyo, JP;
Mitsuhiro Nakamura, Tokyo, JP;
Hironori Itabashi, Tokyo, JP;
Hirofumi Satou, Tokyo, JP;
Tsutomu Saito, Tokyo, JP;
Masahiro Sasajima, Tokyo, JP;
Natsuki Tsuno, Tokyo, JP;
Yohei Nakamura, Tokyo, JP;
HITACHI HIGH-TECH CORPORATION, Tokyo, JP;
Abstract
In order to provide a charged particle beam apparatus capable of stably detecting secondary particles and electromagnetic waves even for a non-conductive sample under high vacuum environment and enabling excellent observation and analysis, the charged particle beam apparatus includes a charged particle gun (), scanning deflectors (and) configured to scan a charged particle beam () emitted from the charged particle gun () onto a sample (), detectors (and) configured to detect a scanning control voltage input from an outside into the scanning deflectors, an arithmetic unit () configured to calculate, based on the detected scanning control voltage, irradiation pixel coordinates for the charged particle beam; and an irradiation controller () configured to control irradiation of the sample with the charged particle beam according to the irradiation pixel coordinates.