The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2021
Filed:
Jun. 21, 2019
Nuflare Technology, Inc., Yokohama, JP;
Shinji Sakamoto, Yokohama, JP;
Kenichi Yasui, Kawasaki, JP;
Chiaki Inaba, Yokohama, JP;
Hikaru Yamamura, Yokohama, JP;
Satoru Fukushima, Yokohama, JP;
Yoshinori Akahane, Kawasaki, JP;
NuFlare Technology, Inc., Yokohama, JP;
Abstract
In one embodiment, a writing data generation method is for generating writing data used by a multi-charged particle beam writing apparatus. The writing data generation method includes referring to library data in which a vertex sequence including a plurality of vertices is registered, and extracting a portion of an outer line of a figure contained in design data, the portion corresponding to the vertex sequence, and representing the extracted portion by information which identifies the vertex sequence and information which indicates a connection method for the plurality of vertices of the vertex sequence, and generating the writing data.