The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 06, 2021

Filed:

Mar. 27, 2020
Applicant:

Exo Imaging, Inc., Redwood City, CA (US);

Inventors:

Sandeep Akkaraju, Wellesley, MA (US);

Haesung Kwon, Austin, TX (US);

Brian Bircumshaw, Oakland, CA (US);

Assignee:

EXO IMAGING, INC., Redwood City, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/00 (2013.01); G01N 29/00 (2006.01); G01H 11/08 (2006.01); G01S 15/02 (2006.01); G01N 29/07 (2006.01); H01G 5/00 (2006.01); H01L 41/113 (2006.01); H01L 41/18 (2006.01); B81B 3/00 (2006.01);
U.S. Cl.
CPC ...
G01H 11/08 (2013.01); G01N 29/07 (2013.01); G01S 15/02 (2013.01); H01G 5/00 (2013.01); H01L 41/1132 (2013.01); H01L 41/183 (2013.01); B81B 3/0021 (2013.01);
Abstract

A micromachined ultrasonic transducer (MUT). The MUT includes: a substrate; a membrane suspending from the substrate; a bottom electrode disposed on the membrane; a piezoelectric layer disposed on the bottom electrode and an asymmetric top electrode is disposed on the piezoelectric layer. The areal density distribution of the asymmetric electrode along an axis has a plurality of local maxima, wherein locations of the plurality of local maxima coincide with locations where a plurality of anti-nodal points at a vibrational resonance frequency is located.


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