The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2021
Filed:
Apr. 12, 2018
Applicant:
Cabot Microelectronics Corporation, Aurora, IL (US);
Inventors:
Tong Li, Singapore, SG;
Hon Wu Lau, Singapore, SG;
Assignee:
CMC Materials, Inc., Aurora, IL (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C09K 3/14 (2006.01); C09G 1/02 (2006.01); C09G 1/04 (2006.01); B24B 37/04 (2012.01);
U.S. Cl.
CPC ...
C09K 3/1472 (2013.01); B24B 37/044 (2013.01); C09G 1/02 (2013.01); C09G 1/04 (2013.01); C09K 3/1463 (2013.01);
Abstract
Described are chemical mechanical processing (CMP) compositions and related methods, including compositions and methods for polishing nickel phosphorus (NiP) surfaces for hard disk applications.