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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10965085 B1

PDFFull Text
Date of Patent:
Mar. 30, 2021

Filed:

Jan. 08, 2018

Laser chamber with metal damper member

Applicant:

Gigaphoton Inc., Tochigi, JP;

Inventors:

Hisakazu Katsuumi, Oyama, JP;

Hiroaki Tsushima, Oyama, JP;

Assignee:

Gigaphoton Inc., Tochigi, JP;

Attorney:

Studebaker & Brackett PC

Primary Examiner:

M A Golub-Miller

Int. Cl.
CPC ...
H01S 3/032 (2006.01); H01S 3/097 (2006.01); H01S 3/0971 (2006.01); G03F 7/20 (2006.01); H01S 3/225 (2006.01); H01S 3/036 (2006.01); H01S 3/03 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01S 3/0323 (2013.01); G03F 7/70025 (2013.01); H01S 3/09705 (2013.01); H01S 3/09713 (2013.01); G03F 7/2053 (2013.01); H01L 21/67225 (2013.01); H01S 3/03 (2013.01); H01S 3/036 (2013.01); H01S 3/225 (2013.01);
Abstract

A laser chamber may include a first discharge electrode, a second discharge electrode, a fan making a laser gas flow through a discharge space between the first and second discharge electrodes, a first insulating member disposed on upstream side and downstream side of the first discharge electrode in the laser gas flow, a first metal damper member disposed on upstream side of the second discharge electrode and a second insulating member disposed on downstream side of the second discharge electrode in the laser gas flow, and a second metal damper member disposed on downstream side of the second insulating member in the laser gas flow. In a boundary portion between the second metal damper member and the second insulating member, a first discharge space side surface of the second metal damper member may be located further toward the opposite side to the discharge space than a second discharge space side surface of the second insulating member. A first corner formed by the first surface and a first side surface of the second metal damper member, the first side surface being on the side of the second insulating member, may be in contact with a second side surface of the second insulating member, the second side surface being on the side of the second metal damper member.

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