The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 30, 2021
Filed:
Sep. 10, 2019
Tokyo Electron Limited, Tokyo, JP;
Kippei Sugita, Miyagi, JP;
Kenji Nagai, Miyagi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A transfer robot system includes a transfer robot configured to transfer a wafer under an operational instruction; a controller configured to output the operational instruction to the transfer robot; a wafer receptacle; and an interferometer. The wafer receptacle comprises a receptacle body having an open front through which an end effector and the wafer pass; a first reflector disposed under a support space; and a first optical element disposed above the support space to face the first reflector, configured to output the light toward the first reflector and receive received light therefrom. The interferometer calculates an optical interference peak, which is generated between the wafer and the first reflector, based on the received light. The controller determines a taught position of the transfer robot based on a variation of the optical interference peak during an operation of the transfer robot.