The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 30, 2021
Filed:
Nov. 29, 2018
Asml Netherlands B.v., Veldhoven, NL;
Wilhelmus Franciscus Johannes Simons, Beesel, NL;
Dave Braaksma, Veldhoven, NL;
Hans Butler, Best, NL;
Hendrikus Herman Marie Cox, Eindhoven, NL;
René Wilhelmus Antonius Hubertus Leenaars, Eindhoven, NL;
Stephan Christiaan Quintus Libourel, Veldhoven, NL;
Martinus Van Duijnhoven, Deurne, NL;
Maurice Willem Jozef Etiënne Wijckmans, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
The present invention relates to a positioning system, including: a first actuator to exert an actuation force on a moveable body, the first actuator being coupled to a balance mass configured to absorb a reaction force resulting from the actuation force, the actuation force providing an acceleration of the moveable body and the reaction force providing an acceleration of the balance mass, wherein a force resulting from the acceleration of the moveable body together with a force resulting from the acceleration of the balance mass result in a balance mass torque; a balance mass support to support the balance mass onto a frame, which balance mass support engages the frame at a support position; and a torque compensator; wherein the torque compensator exerts a compensation force to compensate the balance mass torque, and wherein the torque compensator exerts the compensation force on the frame at the support position.