The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 30, 2021

Filed:

Sep. 13, 2018
Applicants:

Mitsubishi Chemical Corporation, Tokyo, JP;

National University Corporation Tokyo University of Agriculture and Technology, Fuchu, JP;

Inventors:

Kenji Iso, Tokyo, JP;

Akinori Koukitu, Tokyo, JP;

Hisashi Murakami, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 21/02 (2006.01); C23C 16/34 (2006.01); C30B 25/20 (2006.01); C30B 29/38 (2006.01); C30B 29/40 (2006.01); C23C 16/30 (2006.01); H01L 21/205 (2006.01); C23C 16/448 (2006.01); C30B 23/02 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C23C 16/34 (2013.01); C23C 16/303 (2013.01); C23C 16/4488 (2013.01); C30B 23/025 (2013.01); C30B 25/20 (2013.01); C30B 29/38 (2013.01); C30B 29/406 (2013.01); H01L 21/0254 (2013.01); H01L 21/0262 (2013.01); H01L 21/02107 (2013.01); H01L 21/02389 (2013.01); H01L 21/02433 (2013.01); H01L 21/205 (2013.01);
Abstract

The present invention provides a novel method for producing a GaN crystal, the method including growing GaN from vapor phase on a semi-polar or non-polar GaN surface using GaCland NHas raw materials. Provided herein is an invention of a method for producing a GaN crystal, including the steps of: (i) preparing a GaN seed crystal having a non-polar or semi-polar surface whose normal direction forms an angle of 85° or more and less than 170° with a [0001] direction of the GaN seed crystal; and (ii) growing GaN from vapor phase on a surface including the non-polar or semi-polar surface of the GaN seed crystal using GaCland NHas raw materials.


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