The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 23, 2021

Filed:

Dec. 28, 2018
Applicant:

General Electric Company, Schenectady, NY (US);

Inventors:

Stephen Daley Arthur, Niskayuna, NY (US);

Reza Ghandi, Niskayuna, NY (US);

Alexander Viktorovich Bolotnikov, Niskayuna, NY (US);

David Alan Lilienfeld, Niskayuna, NY (US);

Peter Almern Losee, Clifton Park, NY (US);

Assignee:

GENERAL ELECTRIC COMPANY, Niskayuna, NY (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/06 (2006.01); H01L 29/16 (2006.01); H01L 21/04 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0634 (2013.01); H01L 21/0465 (2013.01); H01L 29/0619 (2013.01); H01L 29/0623 (2013.01); H01L 29/1608 (2013.01); H01L 29/66068 (2013.01);
Abstract

A silicon carbide (SiC) charge balance (CB) device includes a CB layer, which includes a first epitaxial (epi) layer. An active area of the first epi layer includes a first doping concentration of a first conductivity type and a first plurality of CB regions of a second conductivity type. A termination area of the first epi layer includes a minimized epi doping concentration of the first conductivity type. The SiC—CB device also includes a device layer, which includes a second epi layer disposed on the CB layer. An active area of the second epi layer includes the first doping concentration of the first conductivity type. A termination area of the device layer includes the minimized epi doping concentration of the first conductivity type and a first plurality of floating regions of the second conductivity type that form a junction termination of the device.


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