The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 23, 2021

Filed:

Aug. 21, 2017
Applicant:

Dai Nippon Printing Co., Ltd., Tokyo-to, JP;

Inventors:

Shinji Maekawa, Tokyo-to, JP;

Hiroshi Kudo, Tokyo-to, JP;

Takamasa Takano, Tokyo-to, JP;

Hiroshi Mawatari, Tokyo-to, JP;

Masaaki Asano, Tokyo-to, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/48 (2006.01); H01L 23/52 (2006.01); H01L 29/40 (2006.01); H01L 21/768 (2006.01); H01L 21/3205 (2006.01); H01L 23/13 (2006.01); H01L 23/14 (2006.01); H01L 23/532 (2006.01); H05K 1/11 (2006.01); H01L 23/522 (2006.01); H01L 23/12 (2006.01); H05K 3/40 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76898 (2013.01); H01L 21/3205 (2013.01); H01L 21/768 (2013.01); H01L 21/76831 (2013.01); H01L 23/12 (2013.01); H01L 23/13 (2013.01); H01L 23/14 (2013.01); H01L 23/481 (2013.01); H01L 23/522 (2013.01); H01L 23/53209 (2013.01); H05K 1/11 (2013.01); H05K 3/40 (2013.01);
Abstract

A through electrode substrate includes: a substrate including first and second surfaces respectively on a first side and a second side opposite to the first, the substrate having a through hole; and a through electrode. The through electrode has a sidewall portion along the through hole sidewall, and a first portion the first surface and connected to the sidewall portion. The through electrode substrate includes: an organic film inside the through hole; an inorganic film that at least partially covers the through electrode first portion from the first side and has an opening on the first portion; and a first wiring layer having an insulation layer to the inorganic film first side and includes an organic layer with an opening communicating with the inorganic film opening, and an electroconductive layer connected to the through electrode first portion through the inorganic film opening and the insulation layer opening.


Find Patent Forward Citations

Loading…