The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 23, 2021
Filed:
Feb. 17, 2017
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Koos Van Berkel, Waalre, NL;
Adrianus Hendrik Koevoets, Mierlo, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
G02B 7/18 (2006.01); G02B 5/08 (2006.01); G03F 1/24 (2012.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G02B 5/0891 (2013.01); G02B 7/1815 (2013.01); G03F 1/24 (2013.01); G03F 7/70875 (2013.01); G03F 7/70891 (2013.01);
Abstract
A reflector for EUV radiation, the reflector comprising a reflector substrate and a reflective surface, the reflector substrate having a plurality of coolant channels formed therein, the coolant channels being substantially straight, substantially parallel to each other and substantially parallel to the reflective surface and configured so that coolant flows in parallel through the coolant channels and in contact with the reflector substrate.