The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 23, 2021

Filed:

Aug. 08, 2014
Applicant:

Carl Zeiss Microscopy Ltd., Cambridge, GB;

Inventors:

Champ Gohil, Cambridge, GB;

Richard Moralee, Cambridge, GB;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/225 (2018.01); G06T 7/11 (2017.01); H01J 37/28 (2006.01); G06T 7/00 (2017.01); G06F 3/0484 (2013.01);
U.S. Cl.
CPC ...
G01N 23/225 (2013.01); G06F 3/04845 (2013.01); G06T 7/0004 (2013.01); G06T 7/11 (2017.01); H01J 37/28 (2013.01); G06T 2200/24 (2013.01); G06T 2207/10061 (2013.01); G06T 2207/20104 (2013.01); G06T 2207/20112 (2013.01); H01J 2237/225 (2013.01); H01J 2237/2806 (2013.01); H01J 2237/2807 (2013.01);
Abstract

A data analysis system is disclosed for generating analysis data depending on microscopic data of an object generated by a charged particle microscope. The microscopic data includes an image showing a structure. A graphical representation of the structure is displayed on the display by the graphical user interface. Separation data is generated representing at least one path of a separation cut, which separates pixels of the structure from each other. The separation cut is visually marked by the graphical user interface, depending on the separation data, by differently marking different area portions of the representation, which represent different pixels of the structure which are separated from each other by the separation cut. Separate analysis data are generated for each of at least two portions of the object, depending on the microscopic data and depending on the separation data.


Find Patent Forward Citations

Loading…