The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 2021
Filed:
Nov. 19, 2018
Applicant:
Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;
Inventors:
Assignee:
Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/3065 (2006.01); H01L 21/687 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01); C23C 16/455 (2006.01); H01L 21/683 (2006.01); H01J 37/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68721 (2013.01); C23C 16/45591 (2013.01); H01J 37/00 (2013.01); H01L 21/67069 (2013.01); H01L 21/67712 (2013.01); H01L 21/67718 (2013.01); H01L 21/67748 (2013.01); H01L 21/6831 (2013.01); H01L 21/68707 (2013.01); H01L 21/68735 (2013.01); H01L 21/68742 (2013.01);
Abstract
In an embodiment, a system includes: a base with a bore hole, wherein the base is configured to secure a wafer at a first position on the base; a pin extending through the bore hole; a focus ring horizontally surrounding the wafer at the first position and extending upwardly from the base, wherein the wafer is configured to be moved vertically between the first position and a second position above the focus ring via the pin; and a slit valve above the focus ring, wherein the wafer is configured to be moved horizontally between the second position and the slit valve via a robotic arm.