The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 2021
Filed:
Jul. 09, 2020
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Stig Bieling, Aalen, DE;
Markus Deguenther, Florstadt, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
An illumination optical unit for projection lithography serves to illuminate an object field along an illumination light beam path. The illumination optical unit includes an optical rod with end-side entrance and exit areas. The optical rod is designed in such a way that illumination light is mixed and homogenized at lateral walls of the optical rod by multiple instances of total internal reflection. An optical rod illumination specification element is disposed upstream of the optical rod in the illumination light beam path and serves to specify an illumination of the entrance area with a distribution, specified over the entrance area, of an illumination intensity and, simultaneously, an illumination angle distribution. The specified illumination intensity distribution deviates from a homogeneous distribution over the entrance area. This can result in an illumination optical unit including an optical rod, in which a specified illumination setting can be set with lower illumination light losses.