The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 2021
Filed:
Nov. 27, 2019
Applicant:
Mks Instruments, Inc., Andover, MA (US);
Inventors:
Gerardo A. Brucker, Longmont, CO (US);
Timothy C. Swinney, Fort Collins, CO (US);
Clinton L. Percy, Windsor, CO (US);
Assignee:
MKS Instruments, Inc., Andover, MA (US);
Primary Examiner:
Int. Cl.
CPC ...
H01J 49/00 (2006.01); G01N 27/622 (2021.01); H01J 37/317 (2006.01);
U.S. Cl.
CPC ...
G01N 27/622 (2013.01); H01J 37/3171 (2013.01); H01J 49/0031 (2013.01);
Abstract
A gas analyzer system uses an ionization source, which can be a hot cathode ionization source. A magnet assembly is positioned to define a magnetic field, which permits separation of ion components based on their mass to charge ratio. An ion beam deflector is used, such as a pair of deflector plates, which can scan ion components across a detector. The ion beam deflector defines a deflection electric field across the magnetic field and across a direction of travel of the ions emitted from the ionization source.