The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 16, 2021

Filed:

Apr. 06, 2017
Applicant:

Riken, Wako, JP;

Inventors:

Ken Harada, Wako, JP;

Keiko Shimada, Wako, JP;

Kodai Niitsu, Wako, JP;

Assignee:

RIKEN, Saitama, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/04 (2018.01); H01J 37/295 (2006.01); G02B 5/18 (2006.01); H01J 37/10 (2006.01); H01J 37/20 (2006.01); H01J 37/244 (2006.01); H01J 37/26 (2006.01);
U.S. Cl.
CPC ...
G01N 23/04 (2013.01); G02B 5/1876 (2013.01); H01J 37/10 (2013.01); H01J 37/20 (2013.01); H01J 37/244 (2013.01); H01J 37/26 (2013.01); H01J 37/295 (2013.01); G01N 2223/315 (2013.01); G01N 2223/418 (2013.01); H01J 2237/2482 (2013.01);
Abstract

The density difference of particle beam irradiation with two optical statuses is produced utilizing a diffraction effect, within the same field of vision, such that a diffraction grating manufactured with a material which passes through a particle beam is provided on the upper side of a specimen and on the lower side of the irradiation optical system. Further, a region wider than the opening region of the diffraction grating is irradiated with the particle beam to produce the density difference of the particle beam emitted to the specimen, by superposing the particle beam, Bragg-diffracted with the opening region, and the particle beam, transmitted through the outer peripheral part of the opening region without being diffracted, with each other, and emitting the beam to the specimen.


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