The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 16, 2021

Filed:

Jul. 31, 2019
Applicant:

Mitutoyo Corporation, Kanagawa, JP;

Inventor:

Koji Kubo, Tokyo, JP;

Assignee:

MITUTOYO CORPORATION, Kanagawa, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01F 23/292 (2006.01); G01J 1/32 (2006.01);
U.S. Cl.
CPC ...
G01F 23/292 (2013.01); G01J 1/32 (2013.01);
Abstract

A non-contact displacement sensor includes a focus timing calculator that, calculates a measurement-side focus timing at which measurement light is focused on a surface of a measurable object, a first reference-side focus timing at which reference light is focused on a first reference surface, and a second reference-side focus timing at which the reference light is focused on a second reference surface; a characteristics calculator that calculates the refractive index characteristics of a liquid lens apparatus based on the first reference-side focus timing, the second reference-side focus timing, and an optical path length difference; and a position calculator that calculates a position of the measurable object based on the refractive index characteristics and a phase of the measurement-side focus timing relative to a period of a drive signal.


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