The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 2021
Filed:
Dec. 05, 2018
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Osamu Hirakawa, Koshi, JP;
Yoshitaka Otsuka, Koshi, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); B08B 7/04 (2006.01); B08B 3/02 (2006.01); B08B 5/02 (2006.01); B08B 5/04 (2006.01); B08B 13/00 (2006.01); B08B 15/04 (2006.01);
U.S. Cl.
CPC ...
B08B 7/04 (2013.01); B08B 3/02 (2013.01); B08B 5/02 (2013.01); B08B 5/04 (2013.01); B08B 13/00 (2013.01); H01L 21/67028 (2013.01); H01L 21/67253 (2013.01); H01L 21/67288 (2013.01); B08B 15/04 (2013.01); B08B 2203/0229 (2013.01);
Abstract
An apparatus for removing at least one foreign substance includes a detection unit detecting the at least one foreign substance adhered to a holding surface of a suction holding unit configured to suck and hold a substrate, a removal unit removing the at least one foreign substance adhered to the holding surface using fluid, and a movement mechanism configured to move the detection unit and the removal unit.