The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 09, 2021
Filed:
Sep. 20, 2019
Kla Corporation, Milpitas, CA (US);
Jenn-Kuen Leong, San Jose, CA (US);
Daniel Kavaldjiev, San Jose, CA (US);
Guoheng Zhao, Palo Alto, CA (US);
KLA Corporation, Milpitas, CA (US);
Abstract
A dark field inspection system may include an illumination source to generate an illumination beam, one or more illumination optics to direct the illumination beam to a sample at an off-axis angle along an illumination direction, a detector, one or more collection optics to generate a dark-field image of the sample on the detector based on light collected from the sample in response to the illumination beam, and a radial polarizer located at a pupil plane of the one or more collection optics, where the radial polarizer rejects light with radial polarization with respect to an apex point in the pupil plane corresponding to specular reflection of the illumination beam from the sample.