The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 09, 2021
Filed:
Dec. 11, 2019
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Satoshi Taga, Miyagi, JP;
Yoshiyuki Kobayashi, Miyagi, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01); C23C 4/08 (2016.01); C23C 16/458 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
C23C 4/08 (2013.01); C23C 16/4581 (2013.01); H01L 21/683 (2013.01); H01L 21/687 (2013.01);
Abstract
A susceptor for receiving a substrate, the susceptor including a ceramics base member, a conductive layer formed on a top surface of the ceramics base member and a side surface of the ceramics base member, the top surface of the ceramics base member configured to receive and support the substrate, and a conducting member contacting the conductive layer at an outer surface of the ceramics base member.