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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10941303 B1

PDFFull Text
Date of Patent:
Mar. 09, 2021

Filed:

Oct. 13, 2017

Chemical conversion of yttria into yttrium fluoride and yttrium oxyfluoride to develop pre-seasoned corossion resistive coating for plasma components

Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Mats Larsson, Sunnyvale, CA (US);

Yogita Pareek, San Jose, CA (US);

Jianqi Wang, Fremont, CA (US);

Kevin A. Papke, Portland, OR (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:

Patterson + Sheridan, LLP

Primary Examiner:

Humera N Sheikh

Assistant Examiner:

Mary I Omori

Int. Cl.
CPC ...
B32B 9/00 (2006.01); C09D 5/08 (2006.01); H01L 21/683 (2006.01); B05D 1/18 (2006.01); C09D 1/00 (2006.01); H01J 37/32 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
C09D 5/08 (2013.01); B05D 1/18 (2013.01); C09D 1/00 (2013.01); H01J 37/32495 (2013.01); H01L 21/67069 (2013.01); H01L 21/6831 (2013.01); H01J 2237/334 (2013.01);
Abstract

Embodiments of the disclosure provide a chamber component for use in a plasma processing chamber apparatus. The chamber component may include a coating layer that provides a fluorine-rich surface. In one embodiment, a chamber component, for use in a plasma processing apparatus, includes a body having an outer layer comprising yttria having a coating layer formed thereon, wherein the coating layer comprises a yttrium fluoride containing material.

Find Patent Forward Citations

Larsson, Mats. (2021). Chemical conversion of yttria into yttrium fluoride and yttrium oxyfluoride to develop pre-seasoned corossion resistive coating for plasma components (U.S. Patent No. 10941303). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10941303

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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