The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 02, 2021

Filed:

Aug. 14, 2019
Applicant:

Nxp B.v., Eindhoven, NL;

Inventors:

Paul Southworth, Groesbeek, NL;

Zhiwei Gong, Chandler, AZ (US);

Assignee:

NXP B.V., Eindhoven, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/00 (2006.01); H01L 21/768 (2006.01); H01L 23/532 (2006.01);
U.S. Cl.
CPC ...
H01L 24/08 (2013.01); H01L 21/76871 (2013.01); H01L 23/53238 (2013.01); H01L 2224/0801 (2013.01);
Abstract

Embodiments are provided for package semiconductor devices, each device including: a low stress pad structure comprising: a dielectric layer, a seed layer having: a center section, and a ring section formed around the center section and over a top surface of the dielectric layer, wherein the ring section of the seed layer includes a set of elongated openings through which a portion of the top surface of the dielectric layer is exposed, and a metal layer having: an inner section formed over a top surface of the center section of the seed layer, and an outer section formed over a top surface of the ring section of the seed layer, wherein a bottom surface of the outer section of the metal layer directly contacts the portion of the top surface of the dielectric layer exposed through the set of elongated openings.


Find Patent Forward Citations

Loading…