The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 02, 2021
Filed:
Dec. 14, 2018
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); H01L 21/67 (2006.01); H01L 21/02 (2006.01); H05B 45/10 (2020.01); H05B 47/16 (2020.01);
U.S. Cl.
CPC ...
H01L 21/67115 (2013.01); G03F 7/70008 (2013.01); G03F 7/70558 (2013.01); G03F 7/70575 (2013.01); G03F 7/70891 (2013.01); H01L 21/02348 (2013.01); H01L 21/67248 (2013.01); H01L 21/67253 (2013.01); H05B 45/10 (2020.01); H05B 47/16 (2020.01);
Abstract
A period from a time point when a wafer W is carried into a housingto a time point when the wafer W after being exposed is completely ready to be carried out is set as a single cycle. A time period before a next cycle is begun and after the single cycle is completed is referred to as a standby time period. When an illuminance in dummy light emission is set to be Id; an illuminance in exposure, Is; a time length of the dummy light emission, Td; and a time length of the exposure, Ts, by setting the Id to satisfy an expression of Id=(Tp/Td)·Iw−(Ts/Td)·Is, an average illuminance within the single cycle is maintained constant between substrates.